Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163797 | Forming interlayer dielectric material by spin-on metal oxide deposition | Chi-Lin Teng, Jung-Hsun Tsai, Hsin-Yen Huang, Hai-Ching Chen, Tien-I Bao | 2018-12-25 |
| 10090245 | Semiconductor device structure | Chi-Lin Teng, Hai-Ching Chen, Hsin-Yen Huang, Tien-I Bao, Jung-Hsun Tsai | 2018-10-02 |
| 10082626 | Adhesion promoter apparatus and method | Chun-Hao Tseng, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao | 2018-09-25 |
| 9892946 | Processing apparatus and method | Shao-Kuan Lee, Hai-Ching Chen | 2018-02-13 |