Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163797 | Forming interlayer dielectric material by spin-on metal oxide deposition | Chi-Lin Teng, Kai-Fang Cheng, Hsin-Yen Huang, Hai-Ching Chen, Tien-I Bao | 2018-12-25 |
| 10090245 | Semiconductor device structure | Kai-Fang Cheng, Chi-Lin Teng, Hai-Ching Chen, Hsin-Yen Huang, Tien-I Bao | 2018-10-02 |
| 9922927 | Method and apparatus for forming self-aligned via with selectively deposited etching stop layer | Yung-Hsu Wu, Hai-Ching Chen, Shau-Lin Shue, Tien-I Bao | 2018-03-20 |