Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162265 | Pattern treatment methods | Jong Keun Park, Amy M. Kwok, Phillip D. Hustad | 2018-12-25 |
| 10133179 | Pattern treatment methods | Jin Wuk Sung, Jong Keun Park, Joshua Kaitz, Vipul Jain, Chunyi Wu +1 more | 2018-11-20 |
| 10114288 | Silicon-containing underlayers | Charlotte Cutler, Suzanne M. Coley, Owendi Ongayi, Christopher P. Sullivan, Paul J. LaBeaume +3 more | 2018-10-30 |
| 10042255 | Block copolymers and pattern treatment compositions and methods | Huaxing Zhou, Vipul Jain, Jin Wuk Sung, Peter Trefonas, III, Phillip D. Hustad | 2018-08-07 |
| 10042259 | Topcoat compositions and pattern-forming methods | Irvinder Kaur, Cong Liu, Doris Kang, Deyan Wang, Huaxing Zhou | 2018-08-07 |
| 10031420 | Wet-strippable silicon-containing antireflectant | Owendi Ongayi, Charlotte Cutler, Shintaro Yamada, James F. Cameron | 2018-07-24 |
| 10007179 | Thermal acid generators and photoresist pattern trimming compositions and methods | Irvinder Kaur, Cong Liu, Kevin Rowell, Gerhard Pohlers | 2018-06-26 |
| 10007184 | Silicon-containing underlayers | Li Cui, Charlotte Cutler, Suzanne M. Coley, Owendi Ongayi, Christopher P. Sullivan +3 more | 2018-06-26 |
| 9880469 | Resins for underlayers | Emad Aqad, Shintaro Yamada, Sung Wook Cho | 2018-01-30 |