| 10162265 |
Pattern treatment methods |
Jong Keun Park, Mingqi Li, Amy M. Kwok |
2018-12-25 |
| 10133179 |
Pattern treatment methods |
Jin Wuk Sung, Mingqi Li, Jong Keun Park, Joshua Kaitz, Vipul Jain +1 more |
2018-11-20 |
| 10078263 |
Underlayer composition and method of imaging underlayer composition |
Peter Trefonas, III, Cynthia Pierre |
2018-09-18 |
| 10042255 |
Block copolymers and pattern treatment compositions and methods |
Huaxing Zhou, Vipul Jain, Jin Wuk Sung, Peter Trefonas, III, Mingqi Li |
2018-08-07 |
| 10011713 |
Copolymer formulation for directed self assembly, methods of manufacture thereof and articles comprising the same |
Peter Trefonas, III, Shih-Wei Chang |
2018-07-03 |
| 9916973 |
Photolithographic methods |
Jong Keun Park |
2018-03-13 |
| 9910353 |
Method of negative tone development using a copolymer multilayer electrolyte and articles made therefrom |
Jong Keun Park, Jieqian Zhang, Vipul Jain, Jin Wuk Sung |
2018-03-06 |
| 9910355 |
Method of negative tone development using a copolymer multilayer electrolyte and articles made therefrom |
Jong Keun Park, Jieqian Zhang, Vipul Jain, Jin Wuk Sung |
2018-03-06 |