Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114288 | Silicon-containing underlayers | Charlotte Cutler, Suzanne M. Coley, Christopher P. Sullivan, Paul J. LaBeaume, Li Cui +3 more | 2018-10-30 |
| 10031420 | Wet-strippable silicon-containing antireflectant | Charlotte Cutler, Mingqi Li, Shintaro Yamada, James F. Cameron | 2018-07-24 |
| 10007184 | Silicon-containing underlayers | Li Cui, Charlotte Cutler, Suzanne M. Coley, Christopher P. Sullivan, Paul J. LaBeaume +3 more | 2018-06-26 |