Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162266 | Photoresist pattern trimming methods | Cheng-Bai Xu, Kevin Rowell | 2018-12-25 |
| 10007179 | Thermal acid generators and photoresist pattern trimming compositions and methods | Irvinder Kaur, Cong Liu, Kevin Rowell, Mingqi Li | 2018-06-26 |