Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162266 | Photoresist pattern trimming methods | Gerhard Pohlers, Kevin Rowell | 2018-12-25 |
| 9996008 | Photoresist pattern trimming methods | — | 2018-06-12 |
| 9869933 | Pattern trimming methods | Kevin Rowell, Cong Liu, Irvinder Kaur, Jong Keun Park | 2018-01-16 |