Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162266 | Photoresist pattern trimming methods | Gerhard Pohlers, Cheng-Bai Xu | 2018-12-25 |
| 10007179 | Thermal acid generators and photoresist pattern trimming compositions and methods | Irvinder Kaur, Cong Liu, Gerhard Pohlers, Mingqi Li | 2018-06-26 |
| 9869933 | Pattern trimming methods | Cong Liu, Cheng-Bai Xu, Irvinder Kaur, Jong Keun Park | 2018-01-16 |