Issued Patents 2018
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139424 | OMM rotation rate sensor including a drive, without stationary electrodes | Andreas Lassl, Odd-Axel Pruetz | 2018-11-27 |
| 10094725 | Production method for a detection apparatus and detection apparatuses | Timo Lindemann | 2018-10-09 |
| 10060944 | Micromechanical sensor device and corresponding manufacturing method | — | 2018-08-28 |
| 10029911 | Micromechanical component including a diffusion stop channel | Achim Breitling, Frank Reichenbach, Julia Amthor | 2018-07-24 |
| 10023460 | Structures for reducing and avoiding stresses on the seal bottom side during laser reseal | Achim Breitling, Frank Reichenbach, Julia Amthor | 2018-07-17 |
| 10017375 | Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser | Frank Reichenbach, Till Schade, Philip Kappe, Alexander Ilin, Mawuli Ametowobla +1 more | 2018-07-10 |
| 10017376 | MEMS element including a stress decoupling structure and a component including such a MEMS element | Johannes Classen, Mirko Hattass, Ralf Reichenbach, Antoine Puygranier | 2018-07-10 |
| 10017380 | Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device | Jan-Peter Stadler | 2018-07-10 |
| 10011479 | MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it | Christoph Schelling, Yvonne Bergmann | 2018-07-03 |
| 10000375 | Structures and process for preventing a projection of the laser resealing structure beyond the wafer surface | Frank Reichenbach, Jens Frey, Julia Amthor | 2018-06-19 |
| 10001374 | Micromechanical sensor and method for manufacturing a micromechanical sensor | Robert Maul | 2018-06-19 |
| 9988261 | Micromechanical device and method for manufacturing a micromechanical device | Julian Gonska, Kathrin Gutsche | 2018-06-05 |
| 9958348 | Micromechanical pressure sensor device and corresponding manufacturing method | Johannes Classen, Arnd Kaelberer | 2018-05-01 |
| 9919919 | Laser reseal including an additional layer and alloy formation | Jens Frey, Mawuli Ametowobla, Philip Kappe | 2018-03-20 |
| 9909874 | Rotation rate sensor | — | 2018-03-06 |
| 9890035 | Method for manufacturing a micromechanical component | Achim Breitling, Frank Reichenbach, Julia Amthor | 2018-02-13 |