Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020169 | Etching device and etching method | Christian Zielke, Hans Artmann, Oliver Breitschaedel, Peter Borwin Staffeld | 2018-07-10 |
| 9958348 | Micromechanical pressure sensor device and corresponding manufacturing method | Johannes Classen, Jochen Reinmuth | 2018-05-01 |
| 9932223 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Hans Artmann, Christian Zielke, Oliver Breitschaedel, Peter Borwin Staffeld | 2018-04-03 |