Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031038 | Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method | — | 2018-07-24 |
| 10017376 | MEMS element including a stress decoupling structure and a component including such a MEMS element | Jochen Reinmuth, Mirko Hattass, Ralf Reichenbach, Antoine Puygranier | 2018-07-10 |
| 9958348 | Micromechanical pressure sensor device and corresponding manufacturing method | Jochen Reinmuth, Arnd Kaelberer | 2018-05-01 |
| 9926188 | Sensor unit including a decoupling structure and manufacturing method therefor | Torsten Kramer, Hubert Benzel, Jens Frey, Daniel Christoph Meisel, Christoph Schelling | 2018-03-27 |
| 9863781 | Self-test for yaw rate sensors | Wolfram Bauer, Rainer Willig, Matthias Meier, Burkhard Kuhlmann, Mathias Reimann +5 more | 2018-01-09 |