Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10017376 | MEMS element including a stress decoupling structure and a component including such a MEMS element | Johannes Classen, Jochen Reinmuth, Mirko Hattass, Ralf Reichenbach | 2018-07-10 |