Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020169 | Etching device and etching method | Arnd Kaelberer, Christian Zielke, Hans Artmann, Oliver Breitschaedel | 2018-07-10 |
| 9932223 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Hans Artmann, Arnd Kaelberer, Christian Zielke, Oliver Breitschaedel | 2018-04-03 |