Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10011479 | MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it | Christoph Schelling, Jochen Reinmuth | 2018-07-03 |