Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10017380 | Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device | Jochen Reinmuth | 2018-07-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10017380 | Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device | Jochen Reinmuth | 2018-07-10 |