Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056287 | Apparatus for treating surfaces of wafer-shaped articles | Ulrich Tschinderle, Thomas Wirnsberger, Rainer Obweger | 2018-08-21 |
| 9968970 | Spin chuck with in situ cleaning capability | Peter Strutzmann | 2018-05-15 |
| 9911630 | Apparatus for treating surfaces of wafer-shaped articles | Bhaskar BANDARAPU | 2018-03-06 |
| 9887120 | Apparatus for treating surfaces of wafer-shaped articles | Michael Brugger, Thomas Wirnsberger | 2018-02-06 |
| 9887122 | Method and apparatus for processing wafer-shaped articles | Hongbo Si, Bhaskar BANDARAPU, Bernhard Loidl | 2018-02-06 |