Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134611 | Collector for use with an apparatus for treating wafer-shaped articles | Reinhold SCHWARZENBACHER | 2018-11-20 |
| 10056287 | Apparatus for treating surfaces of wafer-shaped articles | Andreas Gleissner, Thomas Wirnsberger, Rainer Obweger | 2018-08-21 |