Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134611 | Collector for use with an apparatus for treating wafer-shaped articles | Ulrich Tschinderle | 2018-11-20 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Milan Pliska, Bridget Hill, Michael Brugger | 2018-05-15 |