Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037887 | Method for implanting ions into a semiconductor substrate and an implantation system | Moriz Jelinek, Johannes Georg Laven, Hans-Joachim Schulze, Werner Schustereder | 2018-07-31 |
| 9997379 | Method and apparatus for wafer wet processing | Harald Kraus, Marco Nardoni | 2018-06-12 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Reinhold SCHWARZENBACHER, Milan Pliska, Bridget Hill | 2018-05-15 |
| 9887120 | Apparatus for treating surfaces of wafer-shaped articles | Andreas Gleissner, Thomas Wirnsberger | 2018-02-06 |