Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056287 | Apparatus for treating surfaces of wafer-shaped articles | Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger | 2018-08-21 |
| 10043686 | Apparatus for treating surfaces of wafer-shaped articles | — | 2018-08-07 |
| 9960057 | Device for measuring the distribution or impulse of a series of droplets | Michael Dalmer, Alexander R. Lippert, Philipp Engesser | 2018-05-01 |