Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887122 | Method and apparatus for processing wafer-shaped articles | Hongbo Si, Bhaskar BANDARAPU, Andreas Gleissner | 2018-02-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887122 | Method and apparatus for processing wafer-shaped articles | Hongbo Si, Bhaskar BANDARAPU, Andreas Gleissner | 2018-02-06 |