BL

Bernhard Loidl

Lam Research: 1 patents #185 of 426Top 45%
Overall (2018): #476,372 of 503,207Top 95%
1
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
9887122 Method and apparatus for processing wafer-shaped articles Hongbo Si, Bhaskar BANDARAPU, Andreas Gleissner 2018-02-06