Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911630 | Apparatus for treating surfaces of wafer-shaped articles | Andreas Gleissner | 2018-03-06 |
| 9887122 | Method and apparatus for processing wafer-shaped articles | Hongbo Si, Andreas Gleissner, Bernhard Loidl | 2018-02-06 |