Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128110 | Method to enhance growth rate for selective epitaxial growth | Abhishek Dube, Xuebin Li, Yi-Chiau Huang, Hua Chung | 2018-11-13 |
| 10115607 | Method and apparatus for wafer outgassing control | Xinyu BAO, Chun YAN, Hua Chung | 2018-10-30 |
| 10090147 | Integrated system and method for source/drain engineering | Chun Yan, Xinyu BAO, Melitta Hon, Hua Chung | 2018-10-02 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 10043667 | Integrated method for wafer outgassing reduction | Chun YAN, Xinyu BAO, Hua Chung | 2018-08-07 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Shay Assaf, Kim Vellore, Zhepeng CONG | 2018-05-01 |
| 9929055 | Method to grow thin epitaxial films at low temperature | Abhishek Dube, Hua Chung, Jenn-Yue Wang, Xuebin Li, Yi-Chiau Huang | 2018-03-27 |
| 9923081 | Selective process for source and drain formation | Xinyu BAO, Zhiyuan Ye, Flora Fong-Song CHANG, Abhishek Dube, Xuebin Li +2 more | 2018-03-20 |
| 9881790 | Method to enhance growth rate for selective epitaxial growth | Abhishek Dube, Xuebin Li, Yi-Chiau Huang, Hua Chung | 2018-01-30 |