Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2018-06-05 |
| 9930444 | Audio driver and power supply unit architecture | Craig M. Stanley, Simon K. Porter, John H. Sheerin, Glenn K. Trainer, Ethan L. Huwe +4 more | 2018-03-27 |
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Hamid Noorbakhsh, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2018-03-06 |