| 10164056 |
Vertical field effect transistors with uniform threshold voltage |
Kangguo Cheng, Xin Miao, Peng Xu |
2018-12-25 |
| 10134859 |
Transistor with asymmetric spacers |
Zhenxing Bi, Kangguo Cheng, Peng Xu |
2018-11-20 |
| 10115728 |
Laser spike annealing for solid phase epitaxy and low contact resistance in an SRAM with a shared PFET and NFET trench |
Zuoguang Liu, Gen Tsutsui, Peng Xu |
2018-10-30 |
| 10084094 |
Wrapped source/drain contacts with enhanced area |
Kangguo Cheng, Zuoguang Liu, Peng Xu |
2018-09-25 |
| 10056289 |
Fabrication of vertical transport fin field effect transistors with a self-aligned separator and an isolation region with an air gap |
Kangguo Cheng, Zuoguang Liu, Sebastian Naczas, Peng Xu |
2018-08-21 |
| 10032679 |
Self-aligned doping in source/drain regions for low contact resistance |
Dechao Guo, Zuoguang Liu, Gen Tsutsui |
2018-07-24 |
| 10020381 |
Embedded bottom metal contact formed by a self-aligned contact process for vertical transistors |
Su Chen Fan, Zuoguang Liu, Tenko Yamashita |
2018-07-10 |
| 9947767 |
Self-limited inner spacer formation for gate-all-around field effect transistors |
Robinhsinku Chao, Choonghyun Lee, Chun Wing Yeung, Jingyun Zhang |
2018-04-17 |
