Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153187 | Methods and apparatus for transferring a substrate | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Avinash Avula, Ellie Yieh | 2018-12-11 |
| 10047430 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Peijun Ding, Rong Tao, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan +7 more | 2018-08-14 |
| 10002771 | Methods for chemical mechanical polishing (CMP) processing with ozone | Prayudi Lianto, Kuma Hsiung, Eric J. Bergman, John L. Klocke, Mohamed Rafi +2 more | 2018-06-19 |
| 9993853 | Method and apparatus for backside cleaning of substrates | Sriskantharajah Thirunavukarasu, Jen Sern Lew, Srinivas D. Nemani | 2018-06-12 |
| 9978639 | Methods for reducing copper overhang in a feature of a substrate | Siew Kit Hoi, Jiao Song | 2018-05-22 |
| 9954051 | Structure and method of fabricating three-dimensional (3D) metal-insulator-metal (MIM) capacitor and resistor in semi-additive plating metal wiring | Guan Huei See, Chin Hock Toh, Glen T. Mori | 2018-04-24 |
| 9922874 | Methods of enhancing polymer adhesion to copper | Prayudi Lianto, Sam Lee, Charles Sharbono, Marvin L. Bernt, Guan Huei See | 2018-03-20 |