Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D825504 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, William Johanson, Yu Liu, Brij Datta, Keith A. Miller | 2018-08-14 |
| 9991101 | Magnetron assembly for physical vapor deposition chamber | William Johanson, Brij Datta, Fuhong Zhang, Yu Liu, Prashanth Kothnur | 2018-06-05 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Xin Wang, Prashant Prabhakar Prabhu | 2018-03-06 |