Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128088 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Ziqing Duan, Zheng John Ye, Amit Kumar BANSAL | 2018-11-13 |
| 10109462 | Dual radio-frequency tuner for process control of a plasma process | Edward P. Hammond, IV, Tza-Jing Gung | 2018-10-23 |
| 10083818 | Auto frequency tuned remote plasma source | Mohamad A. Ayoub, Ramesh Bokka, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez | 2018-09-25 |