Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121692 | Substrate holding apparatus | Naoki Toyomura, Takuya Inoue | 2018-11-06 |
| 10032655 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Kaoru Hamaura, Koji Maruyama | 2018-07-24 |
| 9892953 | Substrate gripping apparatus | Naoki Matsuda, Junji Kunisawa, Manao Hoshina | 2018-02-13 |