Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153708 | Three-level power converter | Takaaki Tanaka | 2018-12-11 |
| 10032655 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Kaoru Hamaura, Mitsuru Miyazaki | 2018-07-24 |
| 10014795 | Power converter | — | 2018-07-03 |