Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032655 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Mitsuru Miyazaki, Koji Maruyama | 2018-07-24 |
| 9919403 | Polishing apparatus, polishing pad positioning method, and polishing pad | Takeshi Sakurai, Suguru Ogura | 2018-03-20 |
| 9855638 | Dressing apparatus, polishing apparatus having the dressing apparatus, and polishing method | Satoshi Nagai, Suguru Ogura | 2018-01-02 |