Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032655 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Eiji Hirai, Kaoru Hamaura, Mitsuru Miyazaki, Koji Maruyama | 2018-07-24 |
| 9919403 | Polishing apparatus, polishing pad positioning method, and polishing pad | Kaoru Hamaura, Suguru Ogura | 2018-03-20 |