Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018545 | Substrate cleaning apparatus and method executed in the same | Teruaki HOMBO | 2018-07-10 |
| 9892953 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Manao Hoshina | 2018-02-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018545 | Substrate cleaning apparatus and method executed in the same | Teruaki HOMBO | 2018-07-10 |
| 9892953 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Manao Hoshina | 2018-02-13 |