Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144103 | Polishing apparatus and polishing method | Masaya Seki | 2018-12-04 |
| 9892953 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa | 2018-02-13 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144103 | Polishing apparatus and polishing method | Masaya Seki | 2018-12-04 |
| 9892953 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa | 2018-02-13 |