Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2018-06-19 |
| 9869021 | Showerhead apparatus for a linear batch chemical vapor deposition system | Dennis R. Stucky, Paul Thomas Fabiano, Darren M. Simonelli, Matthew C. Farrell, Robert P. Couilliard | 2018-01-16 |