Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869021 | Showerhead apparatus for a linear batch chemical vapor deposition system | Piero Sferlazzo, Paul Thomas Fabiano, Darren M. Simonelli, Matthew C. Farrell, Robert P. Couilliard | 2018-01-16 |