Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068747 | Methods and devices for examining an electrically charged specimen surface | Michael Schnell, Bernd Schindler, Markus Boese | 2018-09-04 |
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Tristan Bret, Klaus Edinger, Thorsten Hofmann | 2018-08-28 |
| 9910065 | Apparatus and method for examining a surface of a mask | Thorsten Hofmann, Klaus Edinger, Pawel Szych, Gabriel Baralia | 2018-03-06 |
| 9863760 | Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated manner | Ralf Schönberger, Michael R. Jost | 2018-01-09 |