Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Thorsten Hofmann, Klaus Edinger, Gabriel Baralia | 2018-03-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Thorsten Hofmann, Klaus Edinger, Gabriel Baralia | 2018-03-06 |