Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Michael Budach, Tristan Bret, Klaus Edinger | 2018-08-28 |
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Klaus Edinger, Pawel Szych, Gabriel Baralia | 2018-03-06 |