Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119990 | Scanning probe microscope and method for examining a surface with a high aspect ratio | Christof Baur | 2018-11-06 |
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Michael Budach, Tristan Bret, Thorsten Hofmann | 2018-08-28 |
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Thorsten Hofmann, Pawel Szych, Gabriel Baralia | 2018-03-06 |