Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Michael Budach, Klaus Edinger, Thorsten Hofmann | 2018-08-28 |
| 9909218 | Beam-induced etching | Patrik Hoffmann, Michel Rossi, Xavier Multone | 2018-03-06 |