Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068747 | Methods and devices for examining an electrically charged specimen surface | Michael Budach, Bernd Schindler, Markus Boese | 2018-09-04 |
| 9953804 | High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus | Edgar Fichter, Joerg Fober, Dirk Preikszas, Christian Hendrich, Momme Mommsen | 2018-04-24 |
| 9947504 | Particle beam apparatus and method for operating a particle beam apparatus | Klaus Hegele, Edgar Fichter, Michel Aliman, Dirk Preikszas, Christian Hendrich +2 more | 2018-04-17 |