Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald +2 more | 2018-12-04 |
| 9976111 | TiN hard mask and etch residual removal | Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, Jr., Tianniu Chen, Rajiv Krishan Agarwal | 2018-05-22 |