Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10072237 | Photoresist cleaning composition used in photolithography and a method for treating substrate therewith | Randy Li-Kai Chang, Gene Everad Parris, Hsiu-Mei Chen, Yi-Chia Lee, Wen Dar Liu +3 more | 2018-09-11 |
| 9976037 | Composition for treating surface of substrate, method and device | Seiji Inaoka, William Jack Casteel, Jr., Raymond Nicholas Vrtis, Kathleen Esther Theodorou, Mark Richard Brown | 2018-05-22 |
| 9976111 | TiN hard mask and etch residual removal | Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, Jr., Rajiv Krishan Agarwal, Madhukar Bhaskara Rao | 2018-05-22 |
| 9873833 | Etchant solutions and method of use thereof | Gene Everad Parris, William Jack Casteel, Jr. | 2018-01-23 |