Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766541 | Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric compound | Hiroto Yamazaki, Masatoshi Arai, Daisuke Kawana, Kenta Suzuki, Tatsuya Fujii | 2017-09-19 |
| 9639002 | Method of forming resist pattern | Masatoshi Arai, Daichi Takaki | 2017-05-02 |
| 9606433 | Resist composition, method of forming resist pattern, polymeric compound and compound | Yoshiyuki Utsumi, Masatoshi Arai, Takahiro Dazai | 2017-03-28 |
| 9557647 | Resist composition and method of forming resist pattern | Takaya Maehashi, Takashi Nagamine | 2017-01-31 |