Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778567 | Resist composition, method of forming resist pattern, polymeric compound, compound | Masatoshi Arai | 2017-10-03 |
| 9644110 | Method of producing structure containing phase-separated structure and method of forming top coat film | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai | 2017-05-09 |
| 9618842 | Resist composition and method of forming resist pattern | Makiko Irie | 2017-04-11 |
| 9606433 | Resist composition, method of forming resist pattern, polymeric compound and compound | Masatoshi Arai, Takahiro Dazai, Yoshitaka Komuro | 2017-03-28 |
| 9567477 | Undercoat agent and method of producing structure containing phase-separated structure | Takehiro Seshimo, Tasuku Matsumiya, Takaya Maehashi, Takahiro Dazai | 2017-02-14 |