Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690194 | Method of forming resist pattern | Tsuyoshi Nakamura, Masatoshi Arai | 2017-06-27 |
| 9644110 | Method of producing structure containing phase-separated structure and method of forming top coat film | Takehiro Seshimo, Takaya Maehashi, Yoshiyuki Utsumi | 2017-05-09 |
| 9606433 | Resist composition, method of forming resist pattern, polymeric compound and compound | Yoshiyuki Utsumi, Masatoshi Arai, Yoshitaka Komuro | 2017-03-28 |
| 9567477 | Undercoat agent and method of producing structure containing phase-separated structure | Takehiro Seshimo, Tasuku Matsumiya, Takaya Maehashi, Yoshiyuki Utsumi | 2017-02-14 |