Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678423 | Resist composition, method for forming resist pattern, acid generator and compound | Takashi Nagamine, Hideto Nito | 2017-06-13 |
| 9671690 | Resist composition, method for forming resist pattern, photo-reactive quencher and compound | Takashi Nagamine, Miki Shinomiya | 2017-06-06 |
| 9639002 | Method of forming resist pattern | Masatoshi Arai, Yoshitaka Komuro | 2017-05-02 |