Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851637 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Kotaro Endo, Hideto Nito | 2017-12-26 |
| 9682951 | Resist composition, method of forming resist pattern, acid generator, photoreactive quencher, and compound | Kotaro Endo, Miki Shinomiya | 2017-06-20 |
| 9678423 | Resist composition, method for forming resist pattern, acid generator and compound | Hideto Nito, Daichi Takaki | 2017-06-13 |
| 9671690 | Resist composition, method for forming resist pattern, photo-reactive quencher and compound | Daichi Takaki, Miki Shinomiya | 2017-06-06 |
| 9557647 | Resist composition and method of forming resist pattern | Yoshitaka Komuro, Takaya Maehashi | 2017-01-31 |