Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851637 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Kotaro Endo | 2017-12-26 |
| 9678423 | Resist composition, method for forming resist pattern, acid generator and compound | Takashi Nagamine, Daichi Takaki | 2017-06-13 |